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US07986007B2 MOS transistor and manufacturing method thereof 有权
MOS晶体管及其制造方法

MOS transistor and manufacturing method thereof
Abstract:
The structure of the MOS transistor provided in this invention has LDD (lightly doped drain) and halo doped regions removed from the source, the drain or both regions in the substrate for improved linearity range when operated as a voltage-controlled resistor. The removal of the LDD and halo doped regions is performed by simply modifying the standard mask of the MOS process using a logic operation layer with no extra mask required.
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