Invention Grant
- Patent Title: Semiconductor device having metal thin film resistance element
- Patent Title (中): 具有金属薄膜电阻元件的半导体器件
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Application No.: US11792471Application Date: 2006-09-21
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Publication No.: US07986028B2Publication Date: 2011-07-26
- Inventor: Kimihiko Yamashita , Yasunori Hashimoto
- Applicant: Kimihiko Yamashita , Yasunori Hashimoto
- Applicant Address: JP Tokyo
- Assignee: Ricoh Company, Ltd.
- Current Assignee: Ricoh Company, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Cooper & Dunham LLP
- Priority: JP2005-299767 20051014
- International Application: PCT/JP2006/319231 WO 20060921
- International Announcement: WO2007/043340 WO 20070419
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
A semiconductor device, includes a lower layer side insulation film; a wiring pattern formed on the lower layer side insulation film; a base insulation film formed on the lower layer side insulation film and the wiring pattern; and a plurality of metal thin film resistance elements formed on the base insulation film; wherein a connection hole is formed in the base insulation film on the wiring pattern; the wiring pattern and the metal thin film resistance element are electrically connected in the connection hole; the metal thin film resistance element has a belt shape part arranged separately from the connection hole and a connection part continuously formed with the belt shape part and connected to the wiring pattern in the connection hole; and the connection parts of at least two of the metal thin film resistance element are formed in the single connection hole with a gap in between said connection parts.
Public/Granted literature
- US20080100348A1 Semiconductor Device Public/Granted day:2008-05-01
Information query
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