Invention Grant
- Patent Title: Micro-electro mechanical system using snapping tabs, comb and parallel plate actuation
- Patent Title (中): 微电子机械系统采用卡扣，梳子和平行板驱动
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Application No.: US12927648Application Date: 2010-11-19
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Publication No.: US07986073B2Publication Date: 2011-07-26
- Inventor: Asif A. Godil
- Applicant: Asif A. Godil
- Applicant Address: US CA Santa Clara
- Assignee: AG Microsystems Inc.
- Current Assignee: AG Microsystems Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H02N1/00
- IPC: H02N1/00 ; G02B26/08
Abstract:
The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include the ability to close the comb fingers for additional reliability and protection during mirror snapping with over voltage.
Public/Granted literature
- US20110102871A1 Micro electro mechanical system using comb and parallel plate actuation Public/Granted day:2011-05-05
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