Invention Grant
- Patent Title: Measurement of multiple surface test objects with frequency scanning interferometer
- Patent Title (中): 用频率扫描干涉仪测量多个表面测试对象
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Application No.: US12363067Application Date: 2009-01-30
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Publication No.: US07986414B2Publication Date: 2011-07-26
- Inventor: Christopher Alan Lee , Mark Joseph Tronolone
- Applicant: Christopher Alan Lee , Mark Joseph Tronolone
- Applicant Address: US NY Corning
- Assignee: Corning Incorporated
- Current Assignee: Corning Incorporated
- Current Assignee Address: US NY Corning
- Agent Timothy M. Schaeberle
- Main IPC: G01B9/02
- IPC: G01B9/02
Abstract:
A frequency scanning interferometer is arranged for simultaneously measuring multiple surfaces of a test object through a wide range of expected offsets. Knowledge of the expected locations of the test surfaces is compared with a sequence of ambiguity intervals based on a synthetic measurement wavelength to center the test surfaces within the ambiguity intervals.
Public/Granted literature
- US20100195113A1 MEASUREMENT OF MULTIPLE SURFACE TEST OBJECTS WITH FREQUENCY SCANNING INTERFEROMETER Public/Granted day:2010-08-05
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