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US07986415B2 Apparatus and method for optical 3D measurement 有权
用于光学3D测量的装置和方法

Apparatus and method for optical 3D measurement
Abstract:
The invention relates to an apparatus and a method for optical 3D measurement, comprising a first beam deflector for deflecting an illuminating beam onto a measurement object and for deflecting the observation beam which is radiated back by the measurement object, wherein the first beam deflector can move along a path distance S.
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