Invention Grant
- Patent Title: Induced resonance comb drive scanner
- Patent Title (中): 诱导共振梳驱动扫描仪
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Application No.: US12122223Application Date: 2008-05-16
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Publication No.: US07986449B2Publication Date: 2011-07-26
- Inventor: Wyatt O. Davis , Hakan Urey
- Applicant: Wyatt O. Davis , Hakan Urey
- Applicant Address: US WA Redmond
- Assignee: Microvision, Inc.
- Current Assignee: Microvision, Inc.
- Current Assignee Address: US WA Redmond
- Agent Kevin D. Wills
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
Briefly, in accordance with one or more embodiments, a MEMS based scanning platform is arranged to have increased efficiency by driving a first frame of the scanning platform directly by applying a drive voltage to a set of comb fingers disposed on the first frame to cause the first frame to oscillate via torsional rotation of a first flexure and by driving a second frame of the scanning platform indirectly via mechanical coupling of the second frame with the first frame via a second flexure, wherein damping losses and work capacity are such that the operation of the scanning mirror is more efficient than if the set of comb fingers were disposed on the second frame and directly driven by the drive voltage. The scanning platform may comprise a 1D scanner, a 2D scanner, or a multiple-dimensional scanner.
Public/Granted literature
- US20090284816A1 Induced Resonance Comb Drive Scanner Public/Granted day:2009-11-19
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