Invention Grant
- Patent Title: Thermally stable multilayer mirror for the EUV spectral range
- Patent Title (中): 用于EUV光谱范围的耐热多层反射镜
-
Application No.: US12188603Application Date: 2008-08-08
-
Publication No.: US07986455B2Publication Date: 2011-07-26
- Inventor: Torsten Feigl , Nicolas Benoit , Sergiy Yulin , Nobert Kaiser
- Applicant: Torsten Feigl , Nicolas Benoit , Sergiy Yulin , Nobert Kaiser
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee Address: DE Munich
- Agency: Slater & Matsil, L.L.P.
- Priority: DE102006006283 20060210
- Main IPC: F21V9/04
- IPC: F21V9/04 ; G02B1/10
Abstract:
A multilayer mirror includes a layer sequence arranged on a substrate and a plurality of layer pairs. Each layer pair includes a first layer composed of a first material and a second layer composed of a second material. The first layers and the second layers each have a thickness of more than 2 nm, and the first material or the second material is a silicon boride or a molybdenum nitride.
Public/Granted literature
- US20090009858A1 Thermally Stable Multilayer Mirror for the EUV Spectral Range Public/Granted day:2009-01-08
Information query
