Invention Grant
US07986471B2 Optical element supporting device, lens barrel, exposure apparatus, and device manufacturing method
有权
光学元件支撑装置,镜筒,曝光装置及装置的制造方法
- Patent Title: Optical element supporting device, lens barrel, exposure apparatus, and device manufacturing method
- Patent Title (中): 光学元件支撑装置,镜筒,曝光装置及装置的制造方法
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Application No.: US12402155Application Date: 2009-03-11
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Publication No.: US07986471B2Publication Date: 2011-07-26
- Inventor: Hirotoshi Torii
- Applicant: Hirotoshi Torii
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., I.P. Division
- Priority: JP2008-062787 20080312
- Main IPC: G02B7/02
- IPC: G02B7/02

Abstract:
An optical-element supporting device includes a first supporting unit and a second supporting unit configured to support an optical element. The first and second supporting units are spaced apart. The first and second supporting units support the optical element so as to constrain translational motion of the optical element along each of three axial directions and rotation of the optical element about each of the three axes. Where n is the number of axes constrained by the first supporting unit among the translational motion of the optical element along each of the three axial directions and the rotation of the optical element about each of the three axes, and m is the number of axes constrained by the second supporting unit among the translational motion of the optical element along each of the three axial directions and the rotation of the optical element about each of the three axes, n+m=6 is satisfied.
Public/Granted literature
- US20090231735A1 OPTICAL ELEMENT SUPPORTING DEVICE, LENS BARREL, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD Public/Granted day:2009-09-17
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |