Invention Grant
- Patent Title: Optical element module
- Patent Title (中): 光学元件模块
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Application No.: US11444191Application Date: 2006-05-31
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Publication No.: US07986472B2Publication Date: 2011-07-26
- Inventor: Jens Kugler , Ulrich Weber , Bernhard Gellrich , Yim-Bun Patrick Kwan , Peter Deufel
- Applicant: Jens Kugler , Ulrich Weber , Bernhard Gellrich , Yim-Bun Patrick Kwan , Peter Deufel
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT, AG.
- Current Assignee: Carl Zeiss SMT, AG.
- Current Assignee Address: DE Oberkochen
- Agency: Ohlandt, Greeley, Ruggiero & Perle, L.L.P.
- Main IPC: G02B7/02
- IPC: G02B7/02

Abstract:
There is provided an optical element module comprising a first optical element and an optical element holder. The first optical element has a first coefficient of thermal expansion. The optical element holder holds the first optical element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being adapted to the first coefficient of thermal expansion. The optical element is directly contacting the optical element holder in a wide contact area. The contact area is defined by a first contact surface of the first optical element and a second contact surface of the optical element holder, wherein the second contact surface matches the first contact surface. Thus, favorable rigidity and deformation behavior is provided.
Public/Granted literature
- US20070146906A1 Optical element module Public/Granted day:2007-06-28
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |