Invention Grant
US07986473B2 System and method for focal length stabilization using active temperature control 有权
使用主动温度控制的焦距稳定系统和方法

System and method for focal length stabilization using active temperature control
Abstract:
An optical metrological system having a heat-generating light source coaxially mounted near a heat-sensitive lens. The system uses a temperature sensor to monitor the lens temperature and a heating element to heat the lens such that the lens operating temperature is greater than a maximum operating temperature of the light source in order to stabilize the focal length of the lens.
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