Invention Grant
- Patent Title: Method and system for fabricating a data storage medium
- Patent Title (中): 用于制造数据存储介质的方法和系统
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Application No.: US11998715Application Date: 2007-11-30
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Publication No.: US07986484B2Publication Date: 2011-07-26
- Inventor: Zvonimir Z. Bandic , Michael A. Moser
- Applicant: Zvonimir Z. Bandic , Michael A. Moser
- Applicant Address: NL Amsterdam
- Assignee: Hitachi Global Storage Technologies, Netherlands B.V.
- Current Assignee: Hitachi Global Storage Technologies, Netherlands B.V.
- Current Assignee Address: NL Amsterdam
- Main IPC: G11B21/02
- IPC: G11B21/02 ; G08B13/14
Abstract:
Embodiments of the present invention recite a method and system for fabricating a data storage medium. In one embodiment, a detectable pattern is created at the surface of a substrate. An electron beam lithography process is then initiated upon the substrate. The detectable pattern is used to control the positioning of an electron beam relative to the surface of the substrate during the electron beam lithography process.
Public/Granted literature
- US20090140175A1 Method and system for fabricating a data storage medium Public/Granted day:2009-06-04
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