Invention Grant
US07987006B2 Automatic generation of PID parameters for a scanning probe microscope 有权
自动生成扫描探针显微镜的PID参数

Automatic generation of PID parameters for a scanning probe microscope
Abstract:
Linear PID controllers have a transfer function that resembles the frequency response of a notch filter. The PID parameters, KP, KI, and KD (proportional, integral, and derivative gains, respectively) can be extracted from the parameters of a linear notch filter. The linearized modes of scanning probe microscope (SPM) actuators have frequency responses that resemble those of simple second order resonance. Reasonable feedback control can be achieved by an inverse dynamics model of the resonance. A properly parameterized notch filter can cancel the dynamics of a resonance to give good closed-loop response.
Information query
Patent Agency Ranking
0/0