Invention Grant
US07987006B2 Automatic generation of PID parameters for a scanning probe microscope
有权
自动生成扫描探针显微镜的PID参数
- Patent Title: Automatic generation of PID parameters for a scanning probe microscope
- Patent Title (中): 自动生成扫描探针显微镜的PID参数
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Application No.: US11846746Application Date: 2007-08-29
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Publication No.: US07987006B2Publication Date: 2011-07-26
- Inventor: Daniel Y Abramovitch , Storrs T. Hoen , Richard K. Workman
- Applicant: Daniel Y Abramovitch , Storrs T. Hoen , Richard K. Workman
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G05B13/02
- IPC: G05B13/02 ; G06F19/00

Abstract:
Linear PID controllers have a transfer function that resembles the frequency response of a notch filter. The PID parameters, KP, KI, and KD (proportional, integral, and derivative gains, respectively) can be extracted from the parameters of a linear notch filter. The linearized modes of scanning probe microscope (SPM) actuators have frequency responses that resemble those of simple second order resonance. Reasonable feedback control can be achieved by an inverse dynamics model of the resonance. A properly parameterized notch filter can cancel the dynamics of a resonance to give good closed-loop response.
Public/Granted literature
- US20090062935A1 Automatic Generation Of PID Parameters For An Atomic Force Microscope Public/Granted day:2009-03-05
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