Invention Grant
- Patent Title: Manufacturing apparatus of porous glass base material
- Patent Title (中): 多孔玻璃基材的制造装置
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Application No.: US10594529Application Date: 2005-03-07
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Publication No.: US07987686B2Publication Date: 2011-08-02
- Inventor: Tetsuya Otosaka
- Applicant: Tetsuya Otosaka
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: McGinn IP Law Group, PLLC
- Priority: JP2004-094496 20040329
- International Application: PCT/JP2005/003926 WO 20050307
- International Announcement: WO2005/092803 WO 20051006
- Main IPC: C03B37/018
- IPC: C03B37/018

Abstract:
There is provided a manufacturing apparatus of a porous glass base material which can prevent soot from being formed on an upper surface (ceiling) of the process chamber, and reduce the amount of soot that comes off the upper surface and falls. A manufacturing apparatus of a porous glass base material 4 deposits glass particles produced by subjecting a material gas to flame hydrolysis, onto a starting member 1 placed vertically. Here, a plurality of gas inlets 5 are provided in one or more lateral walls of a process chamber including a burner 2 for the deposition therein, in upper portions of the lateral walls and along a ceiling of the process chamber.
Public/Granted literature
- US20070209397A1 Manufacturing Apparatus Of Porous Glass Base Material Public/Granted day:2007-09-13
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