Invention Grant
- Patent Title: Vibration control pedestal and installation method thereof
- Patent Title (中): 振动控制台及其安装方法
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Application No.: US11937384Application Date: 2007-11-08
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Publication No.: US07988122B2Publication Date: 2011-08-02
- Inventor: Seok-Youn Kim , Jung-Sung Hwang , Ho-Young Lee , Do-Hyun Kwun , Jung-Shik Heo
- Applicant: Seok-Youn Kim , Jung-Sung Hwang , Ho-Young Lee , Do-Hyun Kwun , Jung-Shik Heo
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine & Whitt, PLLC
- Priority: KR10-2007-0006620 20070122
- Main IPC: F16M1/00
- IPC: F16M1/00

Abstract:
A vibration control pedestal and an installation method thereof are disclosed, including a method for reducing particles and vibrations while moving equipment, including semiconductor equipment, from one vibration control pedestal to another. The vibration control pedestal includes an equipment support body having at least two equipment support cells. A cell connection unit passes through side surfaces of the equipment support cells and connects the equipment support cells to each other. A bottom structure installed under the equipment support body braces the equipment support body.
Public/Granted literature
- US20080174057A1 VIBRATION CONTROL PEDESTAL AND INSTALLATION METHOD THEREOF Public/Granted day:2008-07-24
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