Invention Grant
US07988292B2 System and method of measuring and mapping three dimensional structures 有权
测量和绘制三维结构的系统和方法

System and method of measuring and mapping three dimensional structures
Abstract:
A system for mapping a three-dimensional structure includes a projecting optical system adapted to project light onto an object, a correction system adapted to compensate the light for at least one aberration in the object, an imaging system adapted to collect light scattered by the object and a wavefront sensor adapted to receive the light collected by the imaging system and to sense a wavefront of the received light. For highly aberrated structures, a number of wavefront measurements are made which are valid over different portions of the structure, and the valid wavefront data is stitched together to yield a characterization of the total structure.
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