Invention Grant
- Patent Title: Byproduct collecting apparatus of semiconductor apparatus
- Patent Title (中): 半导体装置的副产品收集装置
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Application No.: US12226994Application Date: 2007-04-25
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Publication No.: US07988755B2Publication Date: 2011-08-02
- Inventor: Che-Hoo Cho , Jung-Eui Hong , Tae-Woo Kim , In-Mun Hwang
- Applicant: Che-Hoo Cho , Jung-Eui Hong , Tae-Woo Kim , In-Mun Hwang
- Applicant Address: KR Hwaseong-Shi
- Assignee: Milaebo Co., Ltd.
- Current Assignee: Milaebo Co., Ltd.
- Current Assignee Address: KR Hwaseong-Shi
- Agency: Jenkins, Wilson, Taylor & Hunt P.A.
- Priority: KR10-2006-0040700 20060504; KR10-2006-0041531 20060509
- International Application: PCT/KR2007/002008 WO 20070425
- International Announcement: WO2007/129820 WO 20071115
- Main IPC: B01D50/00
- IPC: B01D50/00

Abstract:
Provided is a byproduct collecting apparatus for efficiently collecting reaction-byproducts contained in an exhaust gas exhausted from a process chamber during a semiconductor manufacturing process. The apparatus includes a housing and a trap module. The housing has a gas inlet port and a gas outlet port. The trap module is installed inside the housing and has first plates curved or inclined to guide an exhaust gas flow in a curved fashion.
Public/Granted literature
- US20090107091A1 Byproduct Collecting Apparatus of Semiconductor Apparatus Public/Granted day:2009-04-30
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