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US07988755B2 Byproduct collecting apparatus of semiconductor apparatus 有权
半导体装置的副产品收集装置

Byproduct collecting apparatus of semiconductor apparatus
Abstract:
Provided is a byproduct collecting apparatus for efficiently collecting reaction-byproducts contained in an exhaust gas exhausted from a process chamber during a semiconductor manufacturing process. The apparatus includes a housing and a trap module. The housing has a gas inlet port and a gas outlet port. The trap module is installed inside the housing and has first plates curved or inclined to guide an exhaust gas flow in a curved fashion.
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