Invention Grant
- Patent Title: Electroless deposition of cobalt alloys
- Patent Title (中): 钴合金的无电沉积
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Application No.: US12853655Application Date: 2010-08-10
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Publication No.: US07988774B2Publication Date: 2011-08-02
- Inventor: Algirdas Vaskelis , Aldona Jagminiene , Ina Stankeviciene , Eugenijus Norkus
- Applicant: Algirdas Vaskelis , Aldona Jagminiene , Ina Stankeviciene , Eugenijus Norkus
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Schwegman, Lundberg & Woessner, P.A.
- Main IPC: C23C18/32
- IPC: C23C18/32 ; C23C18/34 ; B05D1/18

Abstract:
Systems and methods for electroless deposition of a cobalt-alloy layer on a copper surface include a solution characterized by a low pH. This solution may include, for example, a cobalt(II) salt, a complexing agent including at least two amine groups, a pH adjuster configured to adjust the pH to below 7.0, and a reducing agent. In some embodiments, the cobalt-alloy is configured to facilitate bonding and copper diffusion characteristics between the copper surface and a dielectric in an integrated circuit.
Public/Granted literature
- US20100304562A1 ELECTROLESS DEPOSITION OF COBALT ALLOYS Public/Granted day:2010-12-02
Information query
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