Invention Grant
- Patent Title: Workpiece support system and method
- Patent Title (中): 工件支撑系统和方法
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Application No.: US11845601Application Date: 2007-08-27
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Publication No.: US07988787B2Publication Date: 2011-08-02
- Inventor: Virgil R. Hester , Jeffrey P. Werner
- Applicant: Virgil R. Hester , Jeffrey P. Werner
- Applicant Address: US IL Peoria
- Assignee: Caterpillar Inc.
- Current Assignee: Caterpillar Inc.
- Current Assignee Address: US IL Peoria
- Agency: Leydig, Voit & Mayer
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306

Abstract:
A workpiece support system for a vacuum coating machine includes a base table having a rotating spindle rod that extends in a vertical direction away from the base table and is capable of powered rotation. A stop post is connected to the table and extends in a vertical direction at a distance from the spindle rod. A workpiece support module is connected to the spindle rod and the stop post, and includes a rotating table with peripheral openings arranged symmetrically around its periphery, a plurality of cogs positioned in the openings, a stationary table connected to the stop post and axially supporting the rotating table, and a driver finger connected to the stationary table. At least one bearing is located around the spindle rod and rotatably isolates the rotating table from the stationary table.
Public/Granted literature
- US20090056630A1 WORKPIECE SUPPORT SYSTEM AND METHOD Public/Granted day:2009-03-05
Information query
IPC分类: