Invention Grant
US07988833B2 System and method for detecting non-cathode arcing in a plasma generation apparatus
有权
用于在等离子体发生装置中检测非阴极电弧的系统和方法
- Patent Title: System and method for detecting non-cathode arcing in a plasma generation apparatus
- Patent Title (中): 用于在等离子体发生装置中检测非阴极电弧的系统和方法
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Application No.: US11855850Application Date: 2007-09-14
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Publication No.: US07988833B2Publication Date: 2011-08-02
- Inventor: Alan F. Krauss
- Applicant: Alan F. Krauss
- Applicant Address: US IL Palatine
- Assignee: Schneider Electric USA, Inc.
- Current Assignee: Schneider Electric USA, Inc.
- Current Assignee Address: US IL Palatine
- Main IPC: C23C14/34
- IPC: C23C14/34
Abstract:
A system and method for detecting the potential of non-cathode arcing in a plasma generation apparatus, such as a physical vapor deposition chamber. The system and method involve computing a statistical parameter of cathode-arcing event data in the chamber and performing a pattern recognition technique to a moving average of the statistical parameter.
Public/Granted literature
- US20080133154A1 System and Method for Detecting Non-Cathode Arcing in a Plasma Generation Apparatus Public/Granted day:2008-06-05
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