Invention Grant
- Patent Title: Method for reducing and homogenizing the thickness of a semiconductor layer which lies on the surface of an electrically insulating material
- Patent Title (中): 减少和均匀位于电绝缘材料表面上的半导体层的厚度的方法
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Application No.: US12023223Application Date: 2008-01-31
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Publication No.: US07988876B2Publication Date: 2011-08-02
- Inventor: Diego Feijoo , Oliver Riemenschneider , Reinhold Wahlich
- Applicant: Diego Feijoo , Oliver Riemenschneider , Reinhold Wahlich
- Applicant Address: DE Munich
- Assignee: Siltronic AG
- Current Assignee: Siltronic AG
- Current Assignee Address: DE Munich
- Agency: Brooks Kushman P.C.
- Priority: DE102007006151 20070207
- Main IPC: B44C1/22
- IPC: B44C1/22 ; H01L21/302

Abstract:
To reduce and homogenize the thickness of a semiconductor layer which lies on the surface of an electrically insulating material, the surface of the semiconductor layer is exposed to the action of an etchant whose redox potential is adjusted as a function of the material and the desired final thickness of the semiconductor layer, so that the material erosion per unit time on the surface of the semiconductor layer due to the etchant becomes less as the thickness of the semiconductor layer decreases, and is only from 0 to 10% of the thickness per second when the desired thickness is reached. The method is carried out without the action of light or the application of an external electrical voltage.
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