Invention Grant
US07989025B2 Film forming method, method for manufacturing organic electroluminescent device, organic electroluminescent device, and electronic apparatus 有权
成膜方法,制造有机电致发光器件的方法,有机电致发光器件和电子设备

Film forming method, method for manufacturing organic electroluminescent device, organic electroluminescent device, and electronic apparatus
Abstract:
A film forming method for forming a film including arranging a liquid composition on a substrate and drying the liquid composition, the liquid composition being obtained by dissolving a functional material in a solvent with a plurality of species of liquid mixed therein, is provided. The method includes: a) firstly reducing a pressure surrounding the liquid composition arranged on the substrate at a first depressurizing speed; b) increasing the pressure surrounding the liquid composition to a predetermined pressures after the step a); and c) secondly reducing the pressure surrounding the liquid composition at a second depressurizing speed, after the step b).
Information query
Patent Agency Ranking
0/0