Invention Grant
- Patent Title: Film forming method, method for manufacturing organic electroluminescent device, organic electroluminescent device, and electronic apparatus
- Patent Title (中): 成膜方法,制造有机电致发光器件的方法,有机电致发光器件和电子设备
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Application No.: US11535705Application Date: 2006-09-27
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Publication No.: US07989025B2Publication Date: 2011-08-02
- Inventor: Hirofumi Sakai , Takaya Tanaka
- Applicant: Hirofumi Sakai , Takaya Tanaka
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2005-281510 20050928
- Main IPC: B05D5/00
- IPC: B05D5/00

Abstract:
A film forming method for forming a film including arranging a liquid composition on a substrate and drying the liquid composition, the liquid composition being obtained by dissolving a functional material in a solvent with a plurality of species of liquid mixed therein, is provided. The method includes: a) firstly reducing a pressure surrounding the liquid composition arranged on the substrate at a first depressurizing speed; b) increasing the pressure surrounding the liquid composition to a predetermined pressures after the step a); and c) secondly reducing the pressure surrounding the liquid composition at a second depressurizing speed, after the step b).
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