Invention Grant
- Patent Title: Method for continuous atmospheric pressure plasma treatment of workpieces
- Patent Title (中): 连续大气压等离子体处理工件的方法
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Application No.: US11993095Application Date: 2006-06-19
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Publication No.: US07989034B2Publication Date: 2011-08-02
- Inventor: Eckhard Prinz , Peter Palm , Frank Forster
- Applicant: Eckhard Prinz , Peter Palm , Frank Forster
- Applicant Address: DE Hamburg
- Assignee: Softal Corona & Plasma GmbH
- Current Assignee: Softal Corona & Plasma GmbH
- Current Assignee Address: DE Hamburg
- Agency: Sand & Sebolt
- Priority: DE102005029360 20050624
- International Application: PCT/EP2006/005838 WO 20060619
- International Announcement: WO2007/000255 WO 20070104
- Main IPC: C23C16/50
- IPC: C23C16/50

Abstract:
A method for continuous atmospheric plasma treatment of an electrically insulating workpiece. The workpiece is arranged at a distance beneath at least one high-voltage electrode which extends across a direction of movement. The electrode and the workpiece are set in motion relative to one another. The high voltage being applied to the high-voltage electrode, preferably is in the form of an AC voltage. A first space situated between the high-voltage electrode and the workpiece is filled with a first atmosphere and a second space on the side of the workpiece facing away from the high-voltage electrode is filled with a second atmosphere that is different from the first atmosphere. The second space is adjacent to a back side of the workpiece. The choice of high voltage and of the first and second atmospheres is made in such a way that a plasma discharge is ignited in the second atmosphere.
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