Invention Grant
- Patent Title: Antireflective coating composition
- Patent Title (中): 防反射涂料组合物
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Application No.: US12060307Application Date: 2008-04-01
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Publication No.: US07989144B2Publication Date: 2011-08-02
- Inventor: M. Dalil Rahman , David Abdallah , Rhuzi Zhang , Douglas McKenzie
- Applicant: M. Dalil Rahman , David Abdallah , Rhuzi Zhang , Douglas McKenzie
- Applicant Address: US NJ Somerville
- Assignee: AZ Electronic Materials USA Corp
- Current Assignee: AZ Electronic Materials USA Corp
- Current Assignee Address: US NJ Somerville
- Agent Sangya Jain
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/30 ; B29C59/16 ; C08F291/02
Abstract:
The present invention relates to an antireflective composition comprising a thermal acid generator and an epoxy polymer comprising at least one unit of structure 1, at least one unit of structure 2, where, R1 to R12 are independently selected from hydrogen and C1-C4 alkyl, structure 1 has a configuration selected from cis, trans or mixture thereof, and x and y are the mole % of the monomeric units in the polymer. The invention also relates to a process for manufacturing a microelectronic device.
Public/Granted literature
- US20090246691A1 Antireflective Coating Composition Public/Granted day:2009-10-01
Information query
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