Invention Grant
- Patent Title: In-plane sensor and method for making same
- Patent Title (中): 平面内传感器及其制作方法
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Application No.: US12220847Application Date: 2008-07-29
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Publication No.: US07989247B2Publication Date: 2011-08-02
- Inventor: Chuan Wei Wang , Sheng Ta Lee
- Applicant: Chuan Wei Wang , Sheng Ta Lee
- Applicant Address: TW Hsin-Chu
- Assignee: PixArt Imaging Incorporation
- Current Assignee: PixArt Imaging Incorporation
- Current Assignee Address: TW Hsin-Chu
- Agency: Tung & Associates
- Priority: TW97117135A 20080509
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G01P15/125
Abstract:
According to the present invention, an in-plane sensor comprises: a fixed structure including a fixed finger and a fixed column connected to each other, the fixed finger having a supported end supported by the fixed column and a suspended end which is unsupported; and a movable structure including at least one mass body and an extending finger connected to each other; wherein the supported end of the fixed finger is closer to the mass body than the suspended end is.
Public/Granted literature
- US20090277267A1 In-plane sensor and method for making same Public/Granted day:2009-11-12
Information query
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