Invention Grant
- Patent Title: Method of manufacturing a micro-electrical-mechanical system with thermally isolated active elements
- Patent Title (中): 制造具有热隔离有源元件的微机电系统的方法
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Application No.: US12365284Application Date: 2009-02-04
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Publication No.: US07989249B2Publication Date: 2011-08-02
- Inventor: Nathan Bluzer , Silai V. Krishnaswamy , Philip C. Smith
- Applicant: Nathan Bluzer , Silai V. Krishnaswamy , Philip C. Smith
- Applicant Address: US CA Los Angeles
- Assignee: Northrop Grumman Systems Corporation
- Current Assignee: Northrop Grumman Systems Corporation
- Current Assignee Address: US CA Los Angeles
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
A method of manufacturing a micro-electrical-mechanical system with thermally isolated active elements. Such a system may embody a bolometer, which is well suited for detecting electromagnetic radiation between 90 GHz and 30 THz while operating at room temperature. The method also discloses a generalized process for manufacturing circuitry incorporating active and passive micro-electrical-mechanical systems in a silicon wafer.
Public/Granted literature
- US20100197063A1 Method of Manufacturing a Micro-Electrical-Mechanical System with Thermally Isolated Active Elements Public/Granted day:2010-08-05
Information query
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