Invention Grant
- Patent Title: TiO2-containing silica glass
- Patent Title (中): 含TiO2的二氧化硅玻璃
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Application No.: US12824923Application Date: 2010-06-28
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Publication No.: US07989378B2Publication Date: 2011-08-02
- Inventor: Akio Koike , Yasutomi Iwahashi , Shinya Kikugawa
- Applicant: Akio Koike , Yasutomi Iwahashi , Shinya Kikugawa
- Applicant Address: JP Tokyo
- Assignee: Asahi Glass Company, Limited
- Current Assignee: Asahi Glass Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-336603 20071227
- Main IPC: C03C3/06
- IPC: C03C3/06 ; C03C3/11 ; C03C3/112
Abstract:
The present invention is to provide a TiO2—SiO2 glass having suitable thermal expansion properties as an optical member of an exposure tool for EUVL. The present invention relates to a TiO2-containing silica glass having a temperature, at which a coefficient of thermal expansion is 0 ppb/° C., falling within the range of 23±4° C. and a temperature width, in which a coefficient of thermal expansion is 0±5 ppb/° C., of 5° C. or more.
Public/Granted literature
- US20100261597A1 TIO2-CONTAINING SILICA GLASS Public/Granted day:2010-10-14
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