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US07989578B2 Negative photosensitive polyimide polymer and uses thereof 有权
负光敏聚酰亚胺聚合物及其用途

Negative photosensitive polyimide polymer and uses thereof
Abstract:
The present invention relates to a negative photosensitive polyimide polymer having a repeating unit of formula (1) as a polymerized unit: wherein G, Q and P* are as defined in the specification. The polyimide polymer of the present invention is developable in an aqueous alkaline solution, and has the properties associated with an insulating layer and photoresist.
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