Invention Grant
- Patent Title: Active-isolation mounts for optical elements
- Patent Title (中): 用于光学元件的主动隔离支架
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Application No.: US12262115Application Date: 2008-10-30
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Publication No.: US07989756B2Publication Date: 2011-08-02
- Inventor: Shiang-Lung Koo , Yi-Ping Hsin , Hideyuki Hashimoto , Bausan Yuan , Pai-Hsueh Yang
- Applicant: Shiang-Lung Koo , Yi-Ping Hsin , Hideyuki Hashimoto , Bausan Yuan , Pai-Hsueh Yang
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Klarquist Sparkman LLP
- Main IPC: G02B7/00
- IPC: G02B7/00

Abstract:
Disclosed are, inter alia, optical components that include an optical element (e.g., mirror) and at least three active-isolation mounts mounting the optical element to a frame (e.g., optical barrel or optical frame). An active-isolation mount has a non-contacting actuator connecting a respective location on the optical element to the frame and provides movability of the respective location relative to the frame in at least one direction. At least one displacement sensor is associated with each respective location on the optical element. The displacement sensors are sensitive to displacements of the respective locations in at least one respective direction and reference the displacements to an absolute reference. The actuators and sensors are connected to a servo control loop to provide feedback control.
Public/Granted literature
- US20090237793A1 ACTIVE-ISOLATION MOUNTS FOR OPTICAL ELEMENTS Public/Granted day:2009-09-24
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |