Invention Grant
- Patent Title: Charged-particle optical system with dual loading options
- Patent Title (中): 具有双重加载选项的带电粒子光学系统
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Application No.: US12608380Application Date: 2009-10-29
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Publication No.: US07989778B2Publication Date: 2011-08-02
- Inventor: Johannes Antonius Maria Van Den Oetelaar , Jorn Hermkens , Pleun Dona , Frank Nederlof , Wim Wondergem
- Applicant: Johannes Antonius Maria Van Den Oetelaar , Jorn Hermkens , Pleun Dona , Frank Nederlof , Wim Wondergem
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Griner, LLP
- Agent Michael O. Scheinberg; David Griner
- Priority: EP08168121 20081031
- Main IPC: H01J37/20
- IPC: H01J37/20 ; G01N35/10

Abstract:
A charged-particle optical system (100) such as an electron microscope has a vacuum chamber (102) with a space (104) for accommodating a specific one (114) of multiple specimens in operational use. The charged-particle optical system has a loader (106) with a part (108) that is moveable into and out of the space. The part is configured for attaching a specimen carrier (110), brought from outside the system, to a first holder (112) or to detach the carrier from the first holder and to remove the carrier from inside the system. The carrier accommodates a first specimen. The system has an interface (116) in a wall of the chamber for removably accommodating the first holder (112) or a second holder (118) with a second specimen (120) mounted thereon.
Public/Granted literature
- US20100108907A1 CHARGED-PARTICLE OPTICAL SYSTEM WITH DUAL LOADING OPTIONS Public/Granted day:2010-05-06
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