Invention Grant
US07989882B2 Transistor with A-face conductive channel and trench protecting well region
有权
具有A面导电沟道和沟槽保护阱区的晶体管
- Patent Title: Transistor with A-face conductive channel and trench protecting well region
- Patent Title (中): 具有A面导电沟道和沟槽保护阱区的晶体管
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Application No.: US11952447Application Date: 2007-12-07
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Publication No.: US07989882B2Publication Date: 2011-08-02
- Inventor: Qingchun Zhang , Anant Agarwal , Charlotte Jonas
- Applicant: Qingchun Zhang , Anant Agarwal , Charlotte Jonas
- Applicant Address: US NC Durham
- Assignee: Cree, Inc.
- Current Assignee: Cree, Inc.
- Current Assignee Address: US NC Durham
- Agency: Withrow & Terranova, P.L.L.C.
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
A transistor structure optimizes current along the A-face of a silicon carbide body to form an AMOSFET that minimizes the JFET effect in the drift region during forward conduction in the on-state. The AMOSFET further shows high voltage blocking ability due to the addition of a highly doped well region that protects the gate corner region in a trench-gated device. The AMOSFET uses the A-face conduction along a trench sidewall in addition to a buried channel layer extending across portions of the semiconductor mesas defining the trench. A doped well extends from at least one of the mesas to a depth within the current spreading layer that is greater than the depth of the trench. A current spreading layer extends between the semiconductor mesas beneath the bottom of the trench to reduce junction resistance in the on-state. A buffer layer between the trench and the deep well further provides protection from field crowding at the trench corner.
Public/Granted literature
- US20090146154A1 Transistor with A-Face Conductive Channel and Trench Protecting Well Region Public/Granted day:2009-06-11
Information query
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