Invention Grant
- Patent Title: Phase change memory
- Patent Title (中): 相变记忆
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Application No.: US12703571Application Date: 2010-02-10
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Publication No.: US07989920B2Publication Date: 2011-08-02
- Inventor: Tzyh-Cheang Lee , Ming-Yi Yang , Fu-Liang Yang , Denny Duan-Iee Tang
- Applicant: Tzyh-Cheang Lee , Ming-Yi Yang , Fu-Liang Yang , Denny Duan-Iee Tang
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
A phase change memory is provided. The method includes forming contact plugs in a first dielectric layer. A second dielectric layer is formed overlying the first dielectric layer and a trench formed therein exposing portions of the contact plugs. A metal layer is formed over surfaces of the trench. One or more heaters are formed from the metal layer such that each heater is formed along one or more sidewalls of the trench, wherein the portion of the heater along the sidewalls does not include a corner region of adjacent sidewalls. The trench is filled with a third dielectric layer, and a fourth dielectric layer is formed over the third dielectric layer. Trenches are formed in the fourth dielectric layer and filled with a phase change material. An electrode is formed over the phase change material.
Public/Granted literature
- US20100140580A1 Phase Change Memory Public/Granted day:2010-06-10
Information query
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