Invention Grant
- Patent Title: Soi vertical bipolar power component
- Patent Title (中): Soi垂直双极性功率元件
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Application No.: US11629022Application Date: 2005-06-10
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Publication No.: US07989921B2Publication Date: 2011-08-02
- Inventor: Ralf Lerner
- Applicant: Ralf Lerner
- Applicant Address: DE Erfurt
- Assignee: X-Fab Semiconductor Foundries AG
- Current Assignee: X-Fab Semiconductor Foundries AG
- Current Assignee Address: DE Erfurt
- Agency: Stevens & Showalter LLP
- Priority: DE102004028474 20040611
- International Application: PCT/DE2005/001036 WO 20050610
- International Announcement: WO2005/122271 WO 20051222
- Main IPC: H01L31/11
- IPC: H01L31/11 ; H01L27/082 ; H01L27/102 ; H01L29/70

Abstract:
An SOI device comprises an isolation trench defining a vertical drift zone, a buried insulating layer to which the isolation trench extends, and an electrode region for emitting charge carriers that is formed adjacent to the insulating layer and that is in contact with the drift zone. The electrode region comprises first strip-shaped portions having a first type of doping and second strip-shaped portions having a second type of doping that is inverse to the first type of doping. A first sidewall doping of the first type of doping is provided at a first sidewall of the isolation trench and a second sidewall doping of the second type of doping is provided at a second sidewall of the isolation trench. The first strip-shaped portions are in contact with the first sidewall doping and the second strip-shaped portions are in contact with the second sidewall doping.
Public/Granted literature
- US20080290366A1 Soi Vertical Bipolar Power Component Public/Granted day:2008-11-27
Information query
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