Invention Grant
US07989934B2 Carrier for bonding a semiconductor chip onto and a method of contracting a semiconductor chip to a carrier
有权
用于将半导体芯片接合的载体和将半导体芯片收缩到载体的方法
- Patent Title: Carrier for bonding a semiconductor chip onto and a method of contracting a semiconductor chip to a carrier
- Patent Title (中): 用于将半导体芯片接合的载体和将半导体芯片收缩到载体的方法
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Application No.: US12526619Application Date: 2008-02-11
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Publication No.: US07989934B2Publication Date: 2011-08-02
- Inventor: Klaas Heres , Paul Dijkstra , Maarten Nollen
- Applicant: Klaas Heres , Paul Dijkstra , Maarten Nollen
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP07003106 20070214
- International Application: PCT/IB2008/050483 WO 20080211
- International Announcement: WO2008/099326 WO 20080821
- Main IPC: H01L23/495
- IPC: H01L23/495

Abstract:
A carrier (100) for bonding a semiconductor chip (114) onto is provided, wherein the carrier (100) comprises a die pad (101) and a plurality of contact pads (102), wherein each of the plurality of contact pads (102) comprises an electrically conductive multilayer stack, wherein the electrically conductive multilayer stack comprises a surface layer (109), a first buffer layer, and a first conductive layer (108). Furthermore, the first buffer layer comprises a material adapted to prevent diffusion of material of the surface layer (109) into the first conductive layer (108), and at least two of the contact pads (102) has an ultrafine pitch relative to each other.
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