Invention Grant
- Patent Title: Contact probe and method of making the same
- Patent Title (中): 接触探头及其制作方法
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Application No.: US12297732Application Date: 2007-04-19
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Publication No.: US07990165B2Publication Date: 2011-08-02
- Inventor: Masahiro Aoyagi , Katsuya Kikuchi , Hiroshi Nakagawa , Yoshikuni Okada , Hiroyuki Fujita , Shoichi Imai , Shigeo Kiyota
- Applicant: Masahiro Aoyagi , Katsuya Kikuchi , Hiroshi Nakagawa , Yoshikuni Okada , Hiroyuki Fujita , Shoichi Imai , Shigeo Kiyota
- Applicant Address: JP Tokyo JP Tokyo JP Sagamihara-shi
- Assignee: National Institute of Advanced Industrial Science and Technology,Kiyoto Manufacturing Co.,TSS Corporation
- Current Assignee: National Institute of Advanced Industrial Science and Technology,Kiyoto Manufacturing Co.,TSS Corporation
- Current Assignee Address: JP Tokyo JP Tokyo JP Sagamihara-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2006-117440 20060421
- International Application: PCT/JP2007/058561 WO 20070419
- International Announcement: WO2007/123185 WO 20071101
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
To provide a contact probe which can easily be connected with a measurement apparatus electrically, can measure a high speed and high frequency signal with a fine pitch easily and correctly, and can easily cope with signal measurement for a plurality of channels, and a method of making the contact probe.It includes a first printed wiring board 3 having a signal electrode 10a and a ground electrode 10b used as a contact part with respect to a measuring object, in which the signal electrode 10a and ground electrode 10b are formed of a metal wiring pattern on a substrate, and a second printed wiring board 2 with a coaxial line structure having shield electrodes 12, 17, 18 which enclose a signal line 15a and the surroundings of the signal line 15a through an insulating layer. The signal electrode 10a of the first printed wiring board 3 and the signal line 15a of the second printed wiring board 2 are electrically connected together, and the ground electrode 10b of the first printed wiring board 3 and the shield electrodes 12, 17, 18 of the second printed wiring board 2 are electrically connected together.
Public/Granted literature
- US20090224781A1 CONTACT PROVE AND METHOD OF MAKING THE SAME Public/Granted day:2009-09-10
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