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US07990168B2 Probe card including a sub-plate with a main supporter and a sub-supporter with the sub-supporter having probe needles 失效
探针卡包括具有主支架的副板和具有探针的副支撑件的副支撑件

Probe card including a sub-plate with a main supporter and a sub-supporter with the sub-supporter having probe needles
Abstract:
A probe card to connect a semiconductor device to test equipment includes a Printed Circuit Board (PCB) in which an electrical wiring pattern is formed, a first connector fixed on an upper surface of the PCB to connect the test equipment to the PCB, probe needles connected to electrode pads of the semiconductor device, and a Flexible PCB (FPCB) to connect the PCB to the probe needles. Accordingly, a signal transmission characteristic can be enhanced, test expenses can be reduced, and ground noise can be reduced.
Abstract(Chinese):

用于将半导体器件连接到测试设备的探针卡包括其中形成电布线图案的印刷电路板（PCB），固定在PCB的上表面上以将测试设备连接到PCB的第一连接器，探针 连接到半导体器件的电极焊盘，以及柔性PCB（FPCB），以将PCB连接到探针。 因此，能够提高信号传递特性，能够降低测试费用，降低接地噪声。

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