Invention Grant
- Patent Title: Deformable micromirror device
- Patent Title (中): 可变形微镜装置
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Application No.: US12005485Application Date: 2007-12-26
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Publication No.: US07990339B2Publication Date: 2011-08-02
- Inventor: Kazuma Arai , Fusao Ishii , Yoshihiro Maeda
- Applicant: Kazuma Arai , Fusao Ishii , Yoshihiro Maeda
- Applicant Address: JP JP
- Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee Address: JP JP
- Agent Bo-In Lin
- Main IPC: G09G3/00
- IPC: G09G3/00

Abstract:
A micromirror device, which makes an image display with digital image data, comprises pixel elements each of which makes pulse width modulation for incident light depending on the deflection state of light and which are arranged in the form of a matrix. Each of the pixel elements has a mirror, and at least one memory cell comprising a transistor and a capacitor. In such a micromirror device, the total value of the propagation delay time of a ROW line, which connects all of transistors of memory cells arranged successively in a ROW direction, and the switching time of each transistor is smaller than the driving interval of the ROW line driven in the minimum display duration of the micromirror device.
Public/Granted literature
- US20080259008A1 Deformable micromirror device Public/Granted day:2008-10-23
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