Invention Grant
US07990539B2 Sensor and method utilizing multiple optical interferometers 有权
使用多个光学干涉仪的传感器和方法

  • Patent Title: Sensor and method utilizing multiple optical interferometers
  • Patent Title (中): 使用多个光学干涉仪的传感器和方法
  • Application No.: US12348262
    Application Date: 2009-01-02
  • Publication No.: US07990539B2
    Publication Date: 2011-08-02
  • Inventor: Chian Chiu Li
  • Applicant: Chian Chiu Li
  • Main IPC: G01B9/02
  • IPC: G01B9/02
Sensor and method utilizing multiple optical interferometers
Abstract:
Disclosed is a low-cost high-resolution compact accelerometer which utilizes multiple self-mixing optical interferometers. The device is also a micro-opto-electro-mechanical systems (MOEMS) sensor. The interferometers are used to detect acceleration as well as monitor the wavelength, temperature, and refractive index and perform differential measurements. In addition, photodetectors are employed to monitor the input optical power.
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