Invention Grant
US07991037B2 Multi-beam laser apparatus 失效
多光束激光装置

Multi-beam laser apparatus
Abstract:
There is provided a multi-beam laser apparatus including: a laser beam source generating a beam; an incident lens disposed on a path of the beam; a beam splitter splitting the beam incident on the incident lens into a plurality of beamlets; and a beam path adjustor disposed on each of paths of the split beamlets to change the respective paths of the split beamlets. The multi-beam laser apparatus easily produces a plurality of beamlets and adjusts paths of the beamlets obtained by a prism to improve machinability quality and uniformity.
Public/Granted literature
Information query
Patent Agency Ranking
0/0