Invention Grant
US07992318B2 Heating apparatus, heating method, and computer readable storage medium
有权
加热装置，加热方法和计算机可读存储介质
- Patent Title: Heating apparatus, heating method, and computer readable storage medium
- Patent Title (中): 加热装置，加热方法和计算机可读存储介质
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Application No.: US12007975Application Date: 2008-01-17
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Publication No.: US07992318B2Publication Date: 2011-08-09
- Inventor: Tatsuya Kawaji , Yuichi Sakai , Masatoshi Kaneda
- Applicant: Tatsuya Kawaji , Yuichi Sakai , Masatoshi Kaneda
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2007-011707 20070122
- Main IPC: F26B11/02
- IPC: F26B11/02
Abstract:
A disclosed heating apparatus for heating a substrate on which a film is coated includes a process chamber having a gas supply opening for supplying a first gas to the process chamber and a gas evacuation opening for evacuating the first gas from the process chamber; a heating plate that is arranged in the process chamber and includes a heating element for heating the substrate; plural protrusions arranged on the heating plate so as to support the substrate; plural suction holes formed in the heating plate so as to attract by suction the substrate toward the heating plate; and a gas inlet adapted to supply a second gas to a gap between the heating plate and the substrate supported by the plural protrusions.
Public/Granted literature
- US20080175999A1 Heating apparatus, heating method, and computer readable storage medium Public/Granted day:2008-07-24
Information query
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