Invention Grant
- Patent Title: Piezoelectric microcantilevers and uses in atomic force microscopy
- Patent Title (中): 压电微悬臂梁和原子力显微镜的应用
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Application No.: US11946534Application Date: 2007-11-28
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Publication No.: US07992431B2Publication Date: 2011-08-09
- Inventor: Wan Y. Shih , Wei-Heng Shih , Zuyan Shen , Qing Zhu
- Applicant: Wan Y. Shih , Wei-Heng Shih , Zuyan Shen , Qing Zhu
- Applicant Address: US PA Philadelphia
- Assignee: Drexel University
- Current Assignee: Drexel University
- Current Assignee Address: US PA Philadelphia
- Agency: Knoble Yoshida & Dubleavy, LLC
- Main IPC: G01B5/28
- IPC: G01B5/28

Abstract:
The invention is direct to a piezoelectric microcantilever for static contact and dynamic noncontact atomic force microscopy which may be carried out in solution. The piezoelectric microcantilever, which includes a piezoelectric layer and a non-piezoelectric layer is capable of self actuation and detection. The piezoelectric layer may be constructed from a lead magnesium niobate-lead titanate (Pb(Mg1/3Nb2/3)O3)0.65—(PbTiO3)0.35(PMN0.65-PT0.35)(PMN-PT), zirconate titanate (PZT)/SiO2 or from any lead-free piezoelectric materials such as doped sodium-potassium niobate-lithium niobate. The piezoelectric layers of the microcantilevers may have dielectric constants of from 1600-3000 and thicknesses below 10 μm. Also disclosed are methods for fabricating microcantilever sensors and methods for atomic force microscopy employing the microcantilevers.
Public/Granted literature
- US20090007645A1 PIEZOELECTRIC MICROCANTILEVERS AND USES IN ATOMIC FORCE MICROSCOPY Public/Granted day:2009-01-08
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