Invention Grant
- Patent Title: Component and method for its manufacture
- Patent Title (中): 组件及其制造方法
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Application No.: US12610536Application Date: 2009-11-02
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Publication No.: US07992442B2Publication Date: 2011-08-09
- Inventor: Stefan Pinter
- Applicant: Stefan Pinter
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102008043382 20081103
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L21/50 ; G01L7/00

Abstract:
A method for reducing microcrack formation and crack growth in the glass carrier of a component having a micromechanical sensor element that is bonded to the glass carrier. The upper side of the glass carrier acts as a bonding surface for the sensor element. The rear side of the glass carrier, situated opposite the upper side, acts as a mounting surface for the component, and the glass carrier has side surfaces that connect the upper side and the rear side. In particular, the glass carrier is formed by a segment of a glass wafer into which at least the contours of the glass carrier have been stamped, so that at least the areas produced in this way of the side surfaces of the glass carrier and the rear side of the glass carrier form a surface that is largely closed and free of microcracks.
Public/Granted literature
- US20100109105A1 COMPONENT AND METHOD FOR ITS MANUFACTURE Public/Granted day:2010-05-06
Information query
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