Invention Grant
- Patent Title: Semiconductor automation buffer storage identification system and method
- Patent Title (中): 半导体自动化缓冲存储识别系统及方法
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Application No.: US11972685Application Date: 2008-01-11
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Publication No.: US07992734B2Publication Date: 2011-08-09
- Inventor: Philip L. Campbell , Denise B. Joe , Edward Sherwood
- Applicant: Philip L. Campbell , Denise B. Joe , Edward Sherwood
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Ian D. Mackinnon
- Main IPC: B66C19/00
- IPC: B66C19/00
Abstract:
A system for reading substrate carriers that includes at least one overhead transport vehicle (OHT) utilizing at least one device for at least one of sensing and/or reading a substrate carrier, and/or wafers arranged therein, when the substrate carrier is proximate the at least one overhead transport vehicle. A method of sensing or reading a substrate carrier includes sensing and/or reading a substrate carrier and/or wafers arranged therein with the overhead transport vehicle.
Public/Granted literature
- US20090178992A1 SEMICONDUCTOR AUTOMATION BUFFER STORAGE IDENTIFICATION SYSTEM AND METHOD Public/Granted day:2009-07-16
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