Invention Grant
US07992973B2 Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element 有权
液体喷射头,液体喷射装置和压电元件

Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
Abstract:
A liquid ejecting head includes a pressure generating chamber communicating with a nozzle opening, and a piezoelectric element generating a pressure change in the pressure generating chamber. In this liquid ejecting head, the piezoelectric element includes a first electrode, a piezoelectric layer provided above the first electrode, and a second electrode provided above the piezoelectric layer at a side opposite to the first electrode. The first electrode has a diffusion-preventing layer containing iridium oxide as a primary component, and the diffusion-preventing layer has stress relieving holes that pass through in the thickness direction thereof and that is filled with a material other than iridium oxide.
Information query
Patent Agency Ranking
0/0