Invention Grant
- Patent Title: Method for producing silicon carbide single crystal
- Patent Title (中): 碳化硅单晶的制造方法
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Application No.: US12301383Application Date: 2007-05-10
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Publication No.: US07993453B2Publication Date: 2011-08-09
- Inventor: Naoki Oyanagi , Tomohiro Syounai , Yasuyuki Sakaguchi
- Applicant: Naoki Oyanagi , Tomohiro Syounai , Yasuyuki Sakaguchi
- Applicant Address: JP Tokyo
- Assignee: Showa Denko K.K.
- Current Assignee: Showa Denko K.K.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2006-138684 20060518
- International Application: PCT/JP2007/060169 WO 20070510
- International Announcement: WO2007/135965 WO 20071129
- Main IPC: C30B19/12
- IPC: C30B19/12 ; C30B25/20

Abstract:
A method for the production of an SiC single crystal includes the steps of growing a first SiC single crystal in a first direction of growth on a first seed crystal formed of an SiC single crystal, disposing the first SiC single crystal grown on the first seed crystal in a direction parallel or oblique to the first direction of growth and cutting the disposed first SiC single crystal in a direction of a major axis in a cross section perpendicular to the first direction of growth to obtain a second seed crystal, using the second seed crystal to grow thereon in a second direction of growth a second SiC single crystal to a thickness greater than a length of the major axis in the cross section, disposing the second SiC single crystal grown on the second seed crystal in a direction parallel or oblique to the second direction of growth and cutting the disposed second SiC single crystal in a direction of a major axis in a cross section perpendicular to the second direction of growth to obtain a third seed crystal, using the third seed crystal to grow thereon a third SiC single crystal, and cutting the third SiC single crystal grown on the third seed crystal in such a manner as to expose a {0001} crystal face, thereby obtaining an SiC single crystal. The method enables the crystal to be enlarged efficiently without impairing crystallinity.
Public/Granted literature
- US20090184327A1 METHOD FOR PRODUCING SILICON CARBIDE SINGLE CRYSTAL Public/Granted day:2009-07-23
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