Invention Grant
- Patent Title: Surface modified quartz glass crucible, and its modification process
- Patent Title (中): 表面改性石英玻璃坩埚及其改性工艺
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Application No.: US12716605Application Date: 2010-03-03
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Publication No.: US07993454B2Publication Date: 2011-08-09
- Inventor: Toshio Tsujimoto , Yoshiyuki Tsuji
- Applicant: Toshio Tsujimoto , Yoshiyuki Tsuji
- Applicant Address: JP Tokyo
- Assignee: Japan Super Quartz Corporation
- Current Assignee: Japan Super Quartz Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2002-094542 20020329
- Main IPC: C30B15/10
- IPC: C30B15/10

Abstract:
A surface modified quartz glass crucible and a process for modifying the crucible includes a layer of a metal oxide on the whole or a part of the inside and/or outside of the crucible, and baking it. At least an inside surface of the crucible is coated with a said metal oxide of magnesium, calcium, strontium or barium. The coated layer of the crucible does not abrade easily and provides a high dislocation free ratio of silicon single crystals pulled by using the crucible.
Public/Granted literature
- US20100154702A1 SURFACE MODIFIED QUARTZ GLASS CRUCIBLE, AND ITS MODIFICATION PROCESS Public/Granted day:2010-06-24
Information query
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