Invention Grant
US07993456B2 Device for carrying out a surface treatment of substrates under vacuum
有权
用于在真空下进行基板的表面处理的装置
- Patent Title: Device for carrying out a surface treatment of substrates under vacuum
- Patent Title (中): 用于在真空下进行基板的表面处理的装置
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Application No.: US10534723Application Date: 2003-11-11
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Publication No.: US07993456B2Publication Date: 2011-08-09
- Inventor: Henrik Ljungcrantz , Torsten Rosell
- Applicant: Henrik Ljungcrantz , Torsten Rosell
- Applicant Address: SE Linkoping
- Assignee: Impact Coatings AB
- Current Assignee: Impact Coatings AB
- Current Assignee Address: SE Linkoping
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: SE0203332 20021113
- International Application: PCT/SE03/01741 WO 20031111
- International Announcement: WO2004/044263 WO 20040527
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C14/00 ; C23F1/00

Abstract:
The present invention relates to a device for carrying out a surface treatment of substrates under vacuum, which comprises a housing (1) comprising chambers (2-5) communicate with a vacuum source, at least one of which chambers serves as vacuum lock to the remaining chambers when surface treatment processes are in progress. The housing (1) is divided into an upper and a lower housing half (6, 7) of which at least one has symmetrically distributed recesses (8). Pivotally mounted between the housing halves (6, 7) is a revolver (9), which comprises recesses (10) in which substrate to be treated is placed. The housing halves (6, 7) are designed to be in two positions, in the first of which they are separated from the revolver (9) and in the second of which they are in contact therewith. In the first position the revolver (9) is designed to be turned to predefined rotational positions at which recesses in the housing halves (6, 7) and the revolver (9) coincide in the chambers (2-5). In the first position the vacuum lock can be opened and evacuated without disturbing the vacuum in other parts of the housing (1).
Public/Granted literature
- US20070084401A1 Device for carrying out a surface treatment of substrates under vacuum Public/Granted day:2007-04-19
Information query
IPC分类: