Invention Grant
- Patent Title: Fabricating and cleaning chamber components having textured surfaces
- Patent Title (中): 制造和清洁具有纹理表面的腔室部件
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Application No.: US12316834Application Date: 2008-12-16
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Publication No.: US07993470B2Publication Date: 2011-08-09
- Inventor: Brian T West , Marc O Schweitzer , Jennifer L Watia
- Applicant: Brian T West , Marc O Schweitzer , Jennifer L Watia
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Janah & Associates, P.C.
- Main IPC: B08B7/00
- IPC: B08B7/00
Abstract:
A method of fabricating a substrate processing chamber component involves forming a component having a textured surface and sweeping a jet of pressurized fluid across the textured surface of the component. The jet of fluid is pressurized sufficiently high to dislodge substantially all the particles from the textured surface. The method can be applied to dislodge grit particles from textured exposed surfaces formed by electromagnetic energy beam scanning and grit blasting. The method can also be applied to remove loosely adhered coating particles from the textured surfaces of coated components.
Public/Granted literature
- US20090120462A1 Fabricating and cleaning chamber components having textured surfaces Public/Granted day:2009-05-14
Information query
