Invention Grant
- Patent Title: Positive resist compositions and patterning process
- Patent Title (中): 正极抗蚀剂组成和图案化工艺
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Application No.: US12355446Application Date: 2009-01-16
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Publication No.: US07993811B2Publication Date: 2011-08-09
- Inventor: Youichi Ohsawa , Takeshi Kinsho , Takeru Watanabe
- Applicant: Youichi Ohsawa , Takeshi Kinsho , Takeru Watanabe
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2008-008750 20080118
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/20 ; G03F7/30 ; G03F7/38

Abstract:
A positive resist composition comprises (A) a resin component which becomes soluble in an alkaline developer under the action of an acid and (B) an acid generator. The resin (A) is a polymer comprising specific recurring units, represented by formula (1). The acid generator (B) is a specific sulfonium salt compound. When processed by lithography, the composition is improved in resolution and forms a pattern with a satisfactory mask fidelity and a minimal LER. Herein R1 is H or methyl, R2 is an acid labile group, R3 is CO2R4 when X is CH2, R3 is H or CO2R4 when X is O, R4 is a monovalent C1-C20 hydrocarbon group, and m is 1 or 2.
Public/Granted literature
- US20090186298A1 POSITIVE RESIST COMPOSITIONS AND PATTERNING PROCESS Public/Granted day:2009-07-23
Information query
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