Invention Grant
- Patent Title: Phase change memory cell and manufacturing method thereof using minitrenches
- Patent Title (中): 相变存储单元及其制造方法
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Application No.: US11045170Application Date: 2005-01-27
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Publication No.: US07993957B2Publication Date: 2011-08-09
- Inventor: Roberto Bez , Fabio Pellizzer , Marina Tosi , Romina Zonca
- Applicant: Roberto Bez , Fabio Pellizzer , Marina Tosi , Romina Zonca
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Priority: EP02425087 20020220
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A process forms a phase change memory cell using a resistive element and a memory region of a phase change material. The resistive element has a first thin portion having a first sublithographic dimension in a first direction; and the memory region has a second thin portion having a second sublithographic dimension in a second direction transverse to the first dimension. The first thin portion and the second thin portion are in direct electrical contact and define a contact area of sublithographic extension. The second thin portion is delimited laterally by oxide spacer portions surrounded by a mold layer which defines a lithographic opening. The spacer portions are formed after forming the lithographic opening, by a spacer formation technique.
Public/Granted literature
- US20050152208A1 Phase change memory cell and manufacturing method thereof using minitrenches Public/Granted day:2005-07-14
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