Invention Grant
- Patent Title: Vertical spacer forming and related transistor
- Patent Title (中): 垂直间隔物形成和相关晶体管
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Application No.: US12540613Application Date: 2009-08-13
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Publication No.: US07993989B2Publication Date: 2011-08-09
- Inventor: Brent A. Anderson , Edward J. Nowak
- Applicant: Brent A. Anderson , Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Richard W. Kotulak
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Methods include, for example, forming a vertically disposed active region on a substrate; forming a first gate over a portion of the vertically disposed active region; forming a dielectric over the portion; exposing an upper surface of the first gate; forming a second gate over the upper surface; and forming a spacer pocket region between the vertically disposed active region, the first gate and the dielectric, wherein the spacer pocket region is self-aligned to a lower surface of the second gate and has a substantially uniform thickness from an upper to a lower extent thereof.
Public/Granted literature
- US20110037104A1 VERTICAL SPACER FORMING AND RELATED TRANSISTOR Public/Granted day:2011-02-17
Information query
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